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"The relationship between microsystem technology and metrology."

Reinoud F. Wolffenbuttel, Cees J. van Mullem (2001)

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DOI: 10.1109/19.982930

access: closed

type: Journal Article

metadata version: 2020-10-26

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  - https://dblp.org/rec/journals/tim/WolffenbuttelM01a
Reinoud F. Wolffenbuttel, Cees J. van Mullem:
The relationship between microsystem technology and metrology. IEEE Trans. Instrum. Meas. 50(6): 1469-1474 (2001)

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