"Mask Design for Optical Microlithography-An Inverse Imaging Problem."

Amyn Poonawala, Peyman Milanfar (2007)

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DOI: 10.1109/TIP.2006.891332

access: closed

type: Journal Article

metadata version: 2020-05-10

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Amyn Poonawala, Peyman Milanfar:
Mask Design for Optical Microlithography-An Inverse Imaging Problem. IEEE Trans. Image Process. 16(3): 774-788 (2007)

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