"Data-Driven Feedforward Learning With Force Ripple Compensation for Wafer ..."

Fazhi Song et al. (2022)

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DOI: 10.1109/TNNLS.2020.3042975

access: closed

type: Journal Article

metadata version: 2022-08-16

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Fazhi Song, Yang Liu, Wen Jin, Jiubin Tan, Wei He:
Data-Driven Feedforward Learning With Force Ripple Compensation for Wafer Stages: A Variable-Gain Robust Approach. IEEE Trans. Neural Networks Learn. Syst. 33(4): 1594-1608 (2022)

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