"Path Planning of Randomly Scattering Waypoints for Wafer Probing Based on ..."

Haobin Shi et al. (2023)

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DOI: 10.1109/TSMC.2022.3184155

access: closed

type: Journal Article

metadata version: 2025-11-23

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Haobin Shi, Jingchen Li, Meng Liang, Maxwell Hwang, Kao-Shing Hwang, Yun-Yu Hsu:
Path Planning of Randomly Scattering Waypoints for Wafer Probing Based on Deep Attention Mechanism. IEEE Trans. Syst. Man Cybern. Syst. 53(1): 529-541 (2023)

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