"A Petri-Net-Based Scheduling Strategy for Dual-Arm Cluster Tools With ..."

Naiqi Wu et al. (2013)

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DOI: 10.1109/TSMCA.2012.2230440

access: closed

type: Journal Article

metadata version: 2023-01-30

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Naiqi Wu, MengChu Zhou, Feng Chu, Chengbin Chu:
A Petri-Net-Based Scheduling Strategy for Dual-Arm Cluster Tools With Wafer Revisiting. IEEE Trans. Syst. Man Cybern. Syst. 43(5): 1182-1194 (2013)

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