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"A Petri-Net-Based Scheduling Strategy for Dual-Arm Cluster Tools With ..."
Naiqi Wu et al. (2013)
- Naiqi Wu, MengChu Zhou, Feng Chu
, Chengbin Chu
:
A Petri-Net-Based Scheduling Strategy for Dual-Arm Cluster Tools With Wafer Revisiting. IEEE Trans. Syst. Man Cybern. Syst. 43(5): 1182-1194 (2013)
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