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2020 – today
- 2022
[c2]Kuan-Ting Ho
, Daniel Monteiro Diniz Reis, Karla Hiller:
Defect-controlled Resistance Degradation of Sputtered Lead Zirconate Titanate Thin Films. IRPS 2022: 10- 2020
- [j4]Katja Meinel, Marcel Melzer, Chris Stoeckel, Alexey Shaporin, Roman Forke, Sven Zimmermann, Karla Hiller, Thomas Otto, Harald Kuhn:
2D Scanning Micromirror with Large Scan Angle and Monolithically Integrated Angle Sensors Based on Piezoelectric Thin Film Aluminum Nitride. Sensors 20(22): 6599 (2020)
2010 – 2019
- 2019
- [j3]Zhi Li, Sai Gao, Uwe Brand, Karla Hiller, Susann Hahn, Gerry Hamdana, Erwin Peiner, Helmut Wolff, Detlef Bergmann:
Nanomechanical Characterization of Vertical Nanopillars Using an MEMS-SPM Nano-Bending Testing Platform. Sensors 19(20): 4529 (2019) - [c1]Katja Meinel, Chris Stoeckel, Marcel Melzer, Sven Zimmermann, Roman Forke, Karla Hiller, Thomas Otto:
Piezoelectric scanning micromirror with built-in sensors based on thin film aluminum nitride. IEEE SENSORS 2019: 1-4 - 2018
- [j2]Daniel Monteiro Diniz Reis, Sven Rzepka, Karla Hiller:
Reliability testing of integrated low-temperature PVD PZT films. Microelectron. Reliab. 88-90: 835-839 (2018)
2000 – 2009
- 2003
- [j1]Thomas Gessner, Andreas Bertz, Christian Lohmann, Steffen Kurth, Karla Hiller:
Advanced Silicon Micromachining. Int. J. Comput. Eng. Sci. 4(2): 151 (2003)
Coauthor Index
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