"Intelligent OPC Engineer Assistant for Semiconductor Manufacturing."

Guojin Chen et al. (2025)

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DOI: 10.1609/AAAI.V39I22.34479

access: open

type: Conference or Workshop Paper

metadata version: 2025-04-17

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Guojin Chen, Haoyu Yang, Bei Yu, Haoxing Ren:
Intelligent OPC Engineer Assistant for Semiconductor Manufacturing. AAAI 2025: 23144-23151

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