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"Suppressing non-collocated disturbances in inferential motion control: ..."

Nic Dirkx, Noud Mooren, Tom Oomen (2021)

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DOI: 10.23919/ACC50511.2021.9482883

access: closed

type: Conference or Workshop Paper

metadata version: 2021-07-30

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  - conf/amcc/DirkxMO21
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Nic Dirkx, Noud Mooren, Tom Oomen:
Suppressing non-collocated disturbances in inferential motion control: with application to a wafer stage. ACC 2021: 4333-4338

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