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"Tracking control for piezo-actuated stage using sliding mode controller ..."

Taufiq Muhammadi et al. (2013)

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DOI: 10.1109/ASCC.2013.6606011

access: closed

type: Conference or Workshop Paper

metadata version: 2018-02-20

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  - conf/ascc/MuhammadiKLW13
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Taufiq Muhammadi, Wookyong Kwon, Duckman Lee, Sangchul Won:
Tracking control for piezo-actuated stage using sliding mode controller with observer-based hysteresis compensation. ASCC 2013: 1-6

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