"Development and Optimization of Contact Module Process for Micro-Bridge ..."

Xiaoxu Kang, Xiaolan Zhong, Ming Li (2019)

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DOI: 10.1109/ASICON47005.2019.8983428

access: closed

type: Conference or Workshop Paper

metadata version: 2020-02-12

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Xiaoxu Kang, Xiaolan Zhong, Ming Li:
Development and Optimization of Contact Module Process for Micro-Bridge Structure based MEMS/Sensor Application. ASICON 2019: 1-4

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