"Mask cost reduction with circuit performance consideration for ..."

Hongbo Zhang et al. (2011)

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DOI: 10.1109/ASPDAC.2011.5722296

access: closed

type: Conference or Workshop Paper

metadata version: 2022-10-02

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Hongbo Zhang, Yuelin Du, Martin D. F. Wong, Kai-Yuan Chao:
Mask cost reduction with circuit performance consideration for self-aligned double patterning. ASP-DAC 2011: 787-792

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