"Layout Decomposition for Quadruple Patterning Lithography and Beyond."

Bei Yu, David Z. Pan (2014)

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DOI: 10.1145/2593069.2593152

access: closed

type: Conference or Workshop Paper

metadata version: 2018-11-06

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Bei Yu, David Z. Pan:
Layout Decomposition for Quadruple Patterning Lithography and Beyond. DAC 2014: 53:1-53:6

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