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"AdaOPC: A Self-Adaptive Mask Optimization Framework for Real Design Patterns."
Wenqian Zhao et al. (2022)
- Wenqian Zhao, Xufeng Yao, Ziyang Yu, Guojin Chen, Yuzhe Ma, Bei Yu, Martin D. F. Wong:
AdaOPC: A Self-Adaptive Mask Optimization Framework for Real Design Patterns. ICCAD 2022: 123:1-123:9
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