"Measurement of Nano-Displacement Based on In-Plane Suspended-Gate MOSFET ..."

Éric Colinet et al. (2008)

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DOI: 10.1109/ISSCC.2008.4523192

access: closed

type: Conference or Workshop Paper

metadata version: 2022-06-23

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Éric Colinet, Cedric Durand, Patrick Audebert, Philippe Renaux, Denis Mercier, Laurent Duraffourg, Eric Ollier, Fabrice Casset, Pascal Ancey, Lionel Buchaillot, Adrian M. Ionescu:
Measurement of Nano-Displacement Based on In-Plane Suspended-Gate MOSFET Detection Compatible with a Front-End CMOS Process. ISSCC 2008: 332-333

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