"Triple Patterning Lithography (TPL) Layout Decomposition using End-Cutting ..."

Bei Yu et al. (2014)

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DOI: —

access: open

type: Informal or Other Publication

metadata version: 2018-08-13

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Bei Yu, Subhendu Roy, Jhih-Rong Gao, David Z. Pan:
Triple Patterning Lithography (TPL) Layout Decomposition using End-Cutting (JM3 Special Session). CoRR abs/1408.0407 (2014)

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