"Development of a Non-Contact Focusing Probe for the Measurement of Micro ..."

Kuang-Chao Fan et al. (2013)

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DOI: 10.20965/IJAT.2013.P0156

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type: Journal Article

metadata version: 2020-07-09

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Kuang-Chao Fan, Ke Zhang, You-Liang Zhang, Qing Zhang:
Development of a Non-Contact Focusing Probe for the Measurement of Micro Cavities. Int. J. Autom. Technol. 7(2): 156-162 (2013)

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