Stop the war!
Остановите войну!
for scientists:
default search action
"Development of Bipolar Electrostatic Chuck with a Beam-Array Assembly ..."
Yuki Taoka et al. (2022)
- Yuki Taoka, Kohei Kawabata, Pasomphone Hemthavy, Seungman Choi, Kunio Takahashi, Shigeki Saito:
Development of Bipolar Electrostatic Chuck with a Beam-Array Assembly Fabricated by Lithography. Int. J. Autom. Technol. 16(4): 471-477 (2022)
manage site settings
To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.