"Electrical characterization of integrated passive devices using thin film ..."

Xin Sun et al. (2013)

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DOI: 10.1631/JZUS.C12MNT01

access: closed

type: Journal Article

metadata version: 2020-05-13

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Xin Sun, Yunhui Zhu, Zhen Hua Liu, Qing-hu Cui, Shenglin Ma, Jing Chen, Min Miao, Yufeng Jin:
Electrical characterization of integrated passive devices using thin film technology for 3D integration. J. Zhejiang Univ. Sci. C 14(4): 235-243 (2013)

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