"Application of Scanning Microwave Microscopy nano-C-V to investigate ..."

Oskar Amster et al. (2018)

> Home

Details and statistics

DOI: 10.1016/J.MICROREL.2018.06.106

access: closed

type: Journal Article

metadata version: 2021-06-04

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - journals/mr/AmsterRYIM18
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/journals/mr/AmsterRYIM18
Oskar Amster, K. A. Rubin, Y. Yang, D. Iyer, Arron Messinger:
Application of Scanning Microwave Microscopy nano-C-V to investigate dopant defect under a poly gate device. Microelectron. Reliab. 88-90: 250-254 (2018)

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.