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"Methodology to determine the impact of linewidth variation on chip scale ..."
Muhammad Bashir et al. (2010)
- Muhammad Bashir, Linda S. Milor, Dae Hyun Kim, Sung Kyu Lim:
Methodology to determine the impact of linewidth variation on chip scale copper/low-k backend dielectric breakdown. Microelectron. Reliab. 50(9-11): 1341-1346 (2010)
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