"Oxygen vacancy formation and the induced defect states in HfO2 ..."

Tsung-Ju Chen, Chin-Lung Kuo (2014)

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DOI: 10.1016/J.MICROREL.2013.10.013

access: closed

type: Journal Article

metadata version: 2020-02-22

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Tsung-Ju Chen, Chin-Lung Kuo:
Oxygen vacancy formation and the induced defect states in HfO₂ and Hf-silicates - A first principles hybrid functional study. Microelectron. Reliab. 54(6-7): 1119-1124 (2014)

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