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"Reliability analysis of CMOS MEMS structures obtained by Front Side Bulk ..."
M. Dardalhon et al. (2002)
- M. Dardalhon, Vincent Beroulle, Laurent Latorre, Pascal Nouet
, Guy Perez, Jean Marc Nicot, Coumar Oudéa:
Reliability analysis of CMOS MEMS structures obtained by Front Side Bulk Micromachining. Microelectron. Reliab. 42(9-11): 1777-1782 (2002)
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