"Integrated thin film heater-thermocouple systems."

Gady Golan et al. (2003)

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DOI: 10.1016/S0026-2714(02)00320-7

access: closed

type: Journal Article

metadata version: 2020-02-22

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Gady Golan, Alex Axelevitch, B. Sigalov, B. Gorenstein:
Integrated thin film heater-thermocouple systems. Microelectron. Reliab. 43(3): 509-512 (2003)

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