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"Degradation of RuO2 thin films in hydrogen atmosphere at ..."
Emil V. Jelenkovic et al. (2003)
- Emil V. Jelenkovic, K. Y. Tong, Wai Yuen Cheung, S. P. Wong:
Degradation of RuO2 thin films in hydrogen atmosphere at temperatures between 150 and 250 degreeC. Microelectron. Reliab. 43(1): 49-55 (2003)
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