"LER and spacing variability on BEOL TDDB using E-field mapping: Impact of ..."

Deniz Kocaay et al. (2017)

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DOI: 10.1016/J.MICROREL.2017.06.053

access: closed

type: Journal Article

metadata version: 2020-02-22

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Deniz Kocaay, Philippe Roussel, Kris Croes, Ivan Ciofi, Y. Saad, Ingrid De Wolf:
LER and spacing variability on BEOL TDDB using E-field mapping: Impact of field acceleration. Microelectron. Reliab. 76-77: 131-135 (2017)

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