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"Reliability assessment of a MEMS microphone under mixed flowing gas ..."
Jue Li et al. (2014)
- Jue Li, Mikael Broas, Jani Raami, Toni T. Mattila, Mervi Paulasto-Kröckel:
Reliability assessment of a MEMS microphone under mixed flowing gas environment and shock impact loading. Microelectron. Reliab. 54(6-7): 1228-1234 (2014)
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