"Universal mechanisms of Al metallization ageing in power MOSFET devices."

Donatien Martineau et al. (2014)

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DOI: 10.1016/J.MICROREL.2014.06.010

access: closed

type: Journal Article

metadata version: 2020-02-22

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Donatien Martineau, Colette Levade, Marc Legros, Philippe Dupuy, Thomas Mazeaud:
Universal mechanisms of Al metallization ageing in power MOSFET devices. Microelectron. Reliab. 54(11): 2432-2439 (2014)

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