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"Correlation between X-ray micro-diffraction and a developed analytical ..."
Sebastien Rigo et al. (2003)
- Sebastien Rigo, Phillippe Goudeau
, Jean-Michel Desmarres, Talal Masri, Jacques-Alain Petit, Petra Schmitt:
Correlation between X-ray micro-diffraction and a developed analytical model to measure the residual stresses in suspended structures in MEMS. Microelectron. Reliab. 43(9-11): 1963-1968 (2003)
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