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"Correlation between X-ray micro-diffraction and a developed analytical ..."

Sebastien Rigo et al. (2003)

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DOI: 10.1016/S0026-2714(03)00331-7

access: closed

type: Journal Article

metadata version: 2020-02-22

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  - https://dblp.org/rec/journals/mr/RigoGDMPS03
Sebastien Rigo, Phillippe Goudeau, Jean-Michel Desmarres, Talal Masri, Jacques-Alain Petit, Petra Schmitt:
Correlation between X-ray micro-diffraction and a developed analytical model to measure the residual stresses in suspended structures in MEMS. Microelectron. Reliab. 43(9-11): 1963-1968 (2003)

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