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"A novel method to measure the internal pressure of MEMS thin-film packages."

B. Wang et al. (2013)

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DOI: 10.1016/J.MICROREL.2013.07.098

access: closed

type: Journal Article

metadata version: 2020-10-26

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B. Wang, Jeroen De Coster, Martine Wevers, Ingrid De Wolf:
A novel method to measure the internal pressure of MEMS thin-film packages. Microelectron. Reliab. 53(9-11): 1663-1666 (2013)

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