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"Outgassing study of thin films used for poly-SiGe based vacuum packaging ..."

Bo Wang et al. (2011)

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DOI: 10.1016/J.MICROREL.2011.06.022

access: closed

type: Journal Article

metadata version: 2020-12-22

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Bo Wang, Shuji Tanaka, B. Guo, G. Vereecke, Simone Severi, Ann Witvrouw, Martine Wevers, Ingrid De Wolf:
Outgassing study of thin films used for poly-SiGe based vacuum packaging of MEMS. Microelectron. Reliab. 51(9-11): 1878-1881 (2011)

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