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"Outgassing study of thin films used for poly-SiGe based vacuum packaging ..."
Bo Wang et al. (2011)
- Bo Wang, Shuji Tanaka, B. Guo, G. Vereecke, Simone Severi, Ann Witvrouw
, Martine Wevers
, Ingrid De Wolf:
Outgassing study of thin films used for poly-SiGe based vacuum packaging of MEMS. Microelectron. Reliab. 51(9-11): 1878-1881 (2011)
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