"Layout Decomposition for Multiple Patterning."

Haitong Tian, Martin D. F. Wong (2016)

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DOI: 10.1007/978-1-4939-2864-4_745

access: closed

type: Reference Work

metadata version: 2017-07-12

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Haitong Tian, Martin D. F. Wong:
Layout Decomposition for Multiple Patterning. Encyclopedia of Algorithms 2016: 1059-1062

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